Rinsing micro-structures w/ N2 is usually not a
problem in most cases. Drying is, i.e. stiction
problem...

> -----Original Message-----
> From: Yilei Zhang [mailto:[email protected]]
> Sent: Tuesday, November 18, 2003 8:24 PM
> To: [email protected]
> Subject: [mems-talk] how to rinse small structure?
>
>
> Hello all:
> Can I use DI water+N2 in a tank to rinse wafer with
> small structures? Will
> it
> damage the structure, for example, will the
> cantilevers break during the
> rinse? thanks.
>
>
> Regards,
> Yilei Zhang