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MEMSnet Home: MEMS-Talk: SiO2 sputtering rate
SiO2 sputtering rate
2003-11-21
[email protected]
SiO2 sputtering rate
[email protected]
2003-11-21
I would definately reduce pressure to the range you are talking about but I
would also increase the power level to around 500 watts if you have the
capability. Everything else looks fine as far as I can see. bob Henderson

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