Dear All;
Hello, I am looking for Silicon Wet Etching Simulator.
I am now trying to make a very sharp tips with the help of
Silicon isotropic wet etching.
Before I begin to proceed real process, I want to see the
expecting results and change the mask design if it is necessary.
I have tried the ACES, but it can not provide the exact mask designing.
If you have some good etching simulator, please tell me where I could get
it.
Thanks.
Choe,S-H
Esashi Laboratory, Tohoku University
E-Mail: [email protected]