Dear Kacob Harel;

I have found one paper concerining on AZ4620.
This paper has all information about AZ4620 photoresist.
I believe it will great help to use this thick photoresist.

Miyajima, H.; Mehregany, M."High-aspect-ratio photolithography for MEMS
applications", Journal of Microelectromechanical Systems,Volume: 4,   Issue:
4,   Year: Dec 1995,Page(s): 220-229

good luck!

Choe,S-H
Esashi-Lab. Tohoku University
TEL: 022-217-6936     FAX: 022-217-6935
E-Mail: [email protected]