I am currently working on the finite elements analysis of a MEMS accelerometer,
but to do the calculation I need to know the properties of polysilicon.
Could someone of you please inform me on the followings?
-young modulus
-poisson ratio
-mass density
-thermal expansion coefficient
-thermal expansion reference temperature
-structural damping coefficient
-stress limit for tension
-stress limit for compression
-stress limit for shear
-thermal conductivity
-emissivity
-specific heat
-hardness.

Thanks.
Best regards.

Jean-Pierre ALFANO
Research Scholar
Florida Atlantic University
Mechanical Engineering Department
777, Glades Road
Boca Raton FL,33432