Can anyone tell me why my LPCVD polysilicon is brown and/or black?  I am
depositing it at 620 C and 300 mTorr with a flow rate of 50 sccm of silane.  The
inside of the quartz furnace tube is coated with silicon, so I'm not sure the
temperature inside the tube is really 620 C.  Do I need to clean it?  If so, how
do I do that?

Thanks,

Robert Barker





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