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MEMSnet Home: MEMS-Talk: Interferometer vs. LSM
Interferometer vs. LSM
2003-11-25
Ritchey, M Barry
2003-11-26
Ritchey, M Barry
2003-11-26
Erik Novak
Interferometer vs. LSM
Ritchey, M Barry
2003-11-26
Can anybody comment [or point me in the right direction] on the pros and
cons of using a white light interferometer vs. a laser scanning microscope
for 3D profiling and surface characterization of MEMS devices...? Is it true
that only interferometers are able to make dynamic measurements?

TIA,

-Barry


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