Dear MEMS colleagues,

I have received too many requests on the spin-on teflon to reply
individually.  So, I'd like to send you the e-mail addresses of vendors.

For technical info
: [email protected]

For info of purchasing or delivery
: [email protected]


Regards,

EH
----------------------------------------------
Eui H. Yang, Ph.D
JSPS Postdoc Fellow
Fujita lab.,IIS, Tokyo Univ.
Tel:+81-3-3402-6231(ext. 2354)
Fax:+81-3-3402-5078
email:[email protected]
http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html



Tony Rogers wrote:
>
> I recently read your e-mail to the MEMS newsgroup regarding the use
> of Teflon spin-on films for a passivation material during KOH
> etching. Could you please send me some details on this (eg where
> to get the material, how to apply it, and importantly how readily
> it can be removed after the KOH process).
>
> Regards
>
> Tony
>
> --
> Tony Rogers
> Applied Microengineering Ltd (AML)
> 68 Milton Park, Abingdon, OXON, OX14 4RX, UK
> Tel: +44 (0) 1235 833 934
> Fax: +44 (0) 1235 833 935
> WWW: http://www.aml.co.uk