Xiaohui,
I have only seen one reference showing that cross-linked SU-8 has a glass
transition temperature after cross-linking (the listed value is >200 C).
However, a test performed in an attempt to verify this value produced no
results; they baked SU-8 at 210 C for 21 hours, with no change in the film,
while baking at 220C caused the film to begin to blacken.
This information was drawn from the following website, which you (like many
other SU-8 users) may already be aware of:
http://aveclafaux.freeservers.com/SU-8.html
The posted glass transition temperature was found in the section marked
"physical properties", while the verification test info was found at the end of
the "Other Properties" section.
Best Regards,
Chad Brubaker
EV Group invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com
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-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Xiaohui Li
Sent: Monday, December 01, 2003 10:00 PM
To: [email protected]
Subject: [mems-talk] Help: how to reflow SU-8 after crosslinking
Hi,
I am trying to reflow SU-8 after cross-linking. Looks that SU-8 is very
difficult to reflow after cross-linked although it has a glass transition
temperature. Did anyone reflow SU-8 before? Can I get some suggestions?
I really appreciate any suggestions.
Xiaohui
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