Hi XiaoHui,
according to http://aveclafaux.freeservers.com/su-8.html#top the Su8 can
not be reflown in a general case - it degrades before it could (it
turns black)... (21h at the 210C did not achieve anything and at 220C it
degrades...)
And I know it contradicts a bit what 'glass transition temperature'
means that should imply that SU8 is a thermoplastic polymer (but isn't
epoxy a thermosetting polymer anyway?) - at any rate the experimental
evidence is there but I wish someone can prove that wrong and could
reflow the SU8...
(I suspect the reflow condition are for the pure epoxy resin, and not
for SU8...)
Franck
-----Original Message-----
From: Xiaohui Li [mailto:[email protected]]
Sent: mardi 2 décembre 2003 13:00
To: [email protected]
Subject: [mems-talk] Help: how to reflow SU-8 after crosslinking
Hi,
I am trying to reflow SU-8 after cross-linking. Looks that SU-8 is very
difficult to reflow after cross-linked although it has a glass
transition
temperature. Did anyone reflow SU-8 before? Can I get some
suggestions?
I really appreciate any suggestions.
Xiaohui
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