Bernd -

You might look into the Liftoff Resist, LOR, distributed by Microchem:
http://www.microchem.com/products/lor.htm

We have had good success lifting off 0.5 um evaporated copper, 0.5 um
sputtered niobium and 2 um evaporated bismuth/copper with LOR5A and
LOR20B.

Jim


On Dec 3, 2003, at 9:59 AM, Krueger, Bernd (Unaxis Optics BZ) wrote:

> Dear All,
>
> does anybody has experience in a metal-lift-off-process? I am
> searching for
> a resist working fine for soft metal with a thickness of about 300nm.
> May be
> you can advise me either negative or positive resists.
>
> I would appreciate any help,
> Thanks in advance,
>
> Bernd Krueger
>
>
>>      Manager Engineering, OPO
>>      mailto:[email protected]
>>
>>      Unaxis Balzers Ltd.
>>      Division Optics
>>      P.O. Box 1000
>>      FL-9496 Balzers / Liechtenstein
>>      Tel.  +423 / 388 4932
>>      Fax. +423 / 388 5185
>>
>>      Unaxis Optics -
>>      the future of Balzers Thin Films
>>
>>      http://www.optics.unaxis.com
>>
>
>
>
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-Jim Beall
303-497-5989