Dear Bernd,
Brewer Science offers a material call PiRL that works quite well for metal
lift-off.
You can find information on PiRL at
http://www.brewerscience.com/sm/sm_tech_info.html .
Regards,
Shane
"Krueger, Bernd (Unaxis Optics BZ)" wrote:
> Dear All,
>
> does anybody has experience in a metal-lift-off-process? I am searching for
> a resist working fine for soft metal with a thickness of about 300nm. May be
> you can advise me either negative or positive resists.
>
> I would appreciate any help,
> Thanks in advance,
>
> Bernd Krueger
>
> > Manager Engineering, OPO
> > mailto:[email protected]
> >
> > Unaxis Balzers Ltd.
> > Division Optics
> > P.O. Box 1000
> > FL-9496 Balzers / Liechtenstein
> > Tel. +423 / 388 4932
> > Fax. +423 / 388 5185
> >
> > Unaxis Optics -
> > the future of Balzers Thin Films
> >
> > http://www.optics.unaxis.com
> >
>
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