Hello Bernd,
Shipley Co. offers standard products for such a Lift-Off process.  There is a
two coat system, with one developer solution used.  The two resist products I
use are called LOL2000, and Microposit 1813, but the key is the LOL2000.  The
pattern is Developed using a third product, LDD-26W.

Regards,
Neal


"Krueger, Bernd (Unaxis Optics BZ)"  wrote:
Dear All,

does anybody has experience in a metal-lift-off-process? I am searching for
a resist working fine for soft metal with a thickness of about 300nm. May be
you can advise me either negative or positive resists.

I would appreciate any help,
Thanks in advance,

Bernd Krueger


> Manager Engineering, OPO
> mailto:[email protected]
>
> Unaxis Balzers Ltd.
> Division Optics
> P.O. Box 1000
> FL-9496 Balzers / Liechtenstein
> Tel. +423 / 388 4932
> Fax. +423 / 388 5185
>
> Unaxis Optics -
> the future of Balzers Thin Films
>
> http://www.optics.unaxis.com
>



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