I used STR 1045 negative PR ( at 2250rpm: thickness 6um) to
lift-off 400nm Au with PR stripper at 70 degrees C.

Works great.

Hope this helps.

ShuTing

ShuTing Hsu
Graduate Student Researcher
Integrated Photonics Laboratory
UCLA EE Department
420 Westwood Plaza, 63-128 Eng 4
Los Angeles, CA 90095
Tel:   (310) 825-7338
Fax:  (310) 794-5513
Email:  [email protected]



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Krueger, Bernd (Unaxis Optics BZ)
Sent: Wednesday, December 03, 2003 9:00 AM
To: '[email protected]'
Subject: [mems-talk] Lift-Off


Dear All,

does anybody has experience in a metal-lift-off-process? I am searching
for a resist working fine for soft metal with a thickness of about
300nm. May be you can advise me either negative or positive resists.

I would appreciate any help,
Thanks in advance,

Bernd Krueger


>       Manager Engineering, OPO
>       mailto:[email protected]
>
>       Unaxis Balzers Ltd.
>       Division Optics
>       P.O. Box 1000
>       FL-9496 Balzers / Liechtenstein
>       Tel.  +423 / 388 4932
>       Fax. +423 / 388 5185
>
>       Unaxis Optics -
>       the future of Balzers Thin Films
>
>       http://www.optics.unaxis.com
>



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