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MEMSnet Home: MEMS-Talk: fluorocarbon residue removal in silicon DRIE
fluorocarbon residue removal in silicon DRIE
2003-12-05
roberto Campedelli
2003-12-05
Debjyoti Banerjee, Ph.D.
2003-12-08
Sunil Kumar
fluorocarbon residue removal in silicon DRIE
roberto Campedelli
2003-12-05
Hello, did you solve the problem with removing fluorocarbon polymers?

Roberto Campedelli
process engineer STMicroelectronics
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