Hi,
    I know that platinum is used during the fabrication of silicon wafer. And an
adhesion layer of Ti/Tiox is used.
Can i know why is platinum (beside using gold) used instead of other metals?
If it is because of conductivty, why aren't silver (one that have the best
conductivity),copper, alumnium which have better conductivity then platinum
used?

It is due to the reaction between Ti/Tiox or does it have anything to do with
Si3n4?

Thank you...
Cindy Seah



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