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MEMSnet Home: MEMS-Talk: Plasmatherm ICP process programming
Plasmatherm ICP process programming
2003-12-11
Yuzhu Li
Plasmatherm ICP process programming
Yuzhu Li
2003-12-11
Hi, We have a ICP 790, the process programming feature is very limited:
maxium steps is 40. There is no cycle feature. I have a program need to
cycle a few steps for many times, how to do that?




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