You can find a lot of sources of comb-drive actuator in any book related to
MEMS.

If you have trouble in finding references, feel free to contact me.

Also, you can contact persons at Lab. for Micro Sensors and Actuators in
Seoul National University, Korea( http://plaza.snu.ac.kr/~micro ). They have
a lot of experiences in design, fabrication and testing of the comb-drive
actuator.

Regards,
Seong-Hyok

=================================================
Seong-Hyok Kim, Ph.D.
Senior Research Engineer

Microsystem Group, Devices & Materials Laboratory
LG Electronics Institute of Technology
16 Woomyeon-dong, Seocho-gu, Seoul 137-724, Korea

Phone : 82-2-526-4781
Fax:      82-2-3461-3508
E-mail:[email protected]
=================================================

----- Original Message -----
From: "김지원" 
To: 
Sent: Tuesday, December 09, 2003 7:28 PM
Subject: [mems-talk] about comb drive....


> Hi~~
>
> At first, sorry!! I can't english well.
>
> I'm student studing MEMS at Korea.
>
> I want to study comb drive.
>
> I see that you have been studied it.
>
> I wish to receive source about it. mask shape, acting principles, process,
etc....
>
> Please!!
>
> Thank you...
>