High Selectivity for GaAs over AlAs for Wet Chemical
Etching
Sai Raghav Parasa
2003-12-12
Hi all,
Can you give 3 best etchants which have high selectivity for GaAs over AlAs for
Wet Chemical Etching?
The etchant should best etch GaAs but should not attack AlAs.
Thanks,
Bye,
Parasa,
University of Kassel, Germany.
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