Hi，Colleagues
   I have made some membrane bridge suspended by 4 springs,which is made of
heavy boron doped layer for KOH stop.The bridge is about 2.5 ~4 micron thick.
However, I found it distorted by the large intrinsic stress (or stress
gradient)from heavy doping. Can anyone give me some advice on how to make the
membrane bridge as flat as it is designed,and yet the temperature is kept under
400degree.Thx in advance.



　　　　　　　　致
礼！


　　　　　　　　miaomin
               from IME,Peking Univ. China
　　　　　　　　[email protected]
　　　　　　　　　　2005-12-12