I am working with the University of South Florida on rebuilding a plasma etcher,
Plasmaline model 211 manufactured by Tegal Corporation. Does anybody have any
information (manuals, schematics, or general knowledge) on this system? I have
called Tegal Corporation but they don't support a system this old.
Thanks
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Jim Culver
Raytheon E-Systems
Communication Division
1501 72nd Street
St Petersburg, FL 33710
e-mail [email protected]
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