High Selectivity for GaAs over AlAs for Wet Chemical
Etching
Sai Raghav Parasa
2003-12-14
Hi All,
Can you give me 3 best etchants which have high selectivity for GaAs over AlAs
for Wet Chemical Etching?
The etchants should etch GaAs effectively and should not attack AlAs.
Thanks,
Parasa,
University of Kassel, Germany.
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