"Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and
Applications"
by Werner Kern

 -----Original Message-----
From:   Adi [mailto:[email protected]]
Sent:   Saturday, December 13, 2003 4:24 AM
To:     [email protected]
Subject:        [mems-talk] Cleaning & Surface Preparation

Dear all
Please recomend a book for Cleaning & Surface Preparation for MEMS
Thank you
A. Levy
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