IBM has developed a polymer that can be spun upto 500um thick.
This can be exposed under a regular ultraviolet light. They have a patent
on it. Does anyone know the patent number or their WEB site so that I can
take a look at it.
Thank you,
Padmaja
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Padmaja Ramadas, Ph.D. e-mail:
[email protected]
Texas Instruments (972)
927-1108 (w)
13532 N. Central Expy., MS 77 Fax:(972) 995-3180
Dallas, TX 75243
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