Dear Mr Kanteres,

Try to ramp heat your sample to 95 deg C. and hold for the time mentioned in
the data sheet. It is possible that the sudden rise in temperature from RT
to 65 deg C. is causing this wrinkling to occur. More gentle heating may
solve the problem. Even though the total baking time will be considerably
longer than that mentioned in the datasheets (i.e. including the ramp-up
time and gradual cool-down) it may produce a better result.

Furhermore, are you using a hotplate or an oven? In an oven, the surface of
the SU-8 may cure first, preventing solvents within from escaping and
resulting in non-uniform cure rates through the film thickness. Try to use a
hotplate as this will heat the SU-8 layer from bottom up.

Let me know if your situation improves.

Michael

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