You could try e-beam deposition of a highly tensile film to flatten it out.
Perhaps the patterning of a 0.2 micron Nickel film, for example.





miaomin  wrote:
Hi£¬Colleagues
I have made some membrane bridge suspended by 4 springs,which is made of heavy
boron doped layer for KOH stop.The bridge is about 2.5 ~4 micron thick. However,
I found it distorted by the large intrinsic stress (or stress gradient)from
heavy doping. Can anyone give me some advice on how to make the membrane bridge
as flat as it is designed,and yet the temperature is kept under 400degree.Thx in
advance.



¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡ÖÂ
Àñ£¡


¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡miaomin
from IME,Peking Univ. China
¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡[email protected]
¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡¡2005-12-12



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