Hi all!
I'm looking for refrences, papers, articles related to realization of
via in pyrex wafer using Drie etch process and metalization of these
ones.
Thank you very much.

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Dr. Paolo Bondavalli
R&D MEMS Engineer
MICROTEC MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
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Disclaimer: Opinions expressed herein are my own and may
  not represent those of my employer.
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