A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SiN deposition on glass
SiN deposition on glass
2003-12-17
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-17
Ravi Mullapudi
2003-12-19
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-19
Isaac Wing Tak Chan
SiN deposition on glass
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-17
 anybody have experience with the deposition of SiN on the glass substrate
with the help of RF sputtering unit.
kindly guide me.
thanks
INDU SHEKHAR BAJPAYEE
JPA, MICROELECTRONICS CENTER
INDIAN INSTITUTE OF TECHNOLGY
KHARAGPUR
WEST BENGAL -721302



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Nano-Master, Inc.
MEMS Technology Review
Process Variations in Microsystems Manufacturing