Hello everybody,
for a 3 wafer project I have to make an SU-8 layer of less than 1um. I have
Su-8-25 available with EPON/GBL 60%/40%. Spinning this 40sec at 6200rpm
(this is maximum) leads to a 10um layer after PEB. Does any one knows how to
thin and spin SU8-25 that a 1um layer can be done.
Regards,
Heiko
[email protected]
Micromotive GmbH
Carl-Zeiss-Str. 18-20
55129 Mainz
Tel.: 06131/62780-10
Fax.: 06131/62780-15
