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MEMSnet Home: MEMS-Talk: Adhesion layers for PECVD oxide
Adhesion layers for PECVD oxide
2003-12-17
Sjoerd Haasl
2003-12-17
Steven F. Nagle
2003-12-17
Kirt Williams
2003-12-18
Paolo Tassini
2003-12-17
[email protected]
Adhesion layers for PECVD oxide
[email protected]
2003-12-17
As long as your film stress is low from the pecvd reactor you shouldn't have
problem with either gold or aluminum adhesion. You might want to subject your
gold to an ash with Argon or Oxygen just to roughen the surface prior to pecvd
but I would only do this if you have a problem. Bob Henderson


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