You might call up STS since they seem to have a very good deep oxide rie
system, they may also know something about pyrex.  I think many people
would be very interested in seeing what you find posted back on this
site.  Thanks.

Paolo Bondavalli wrote:

>Hi all!
>I'm looking for refrences, papers, articles related to realization of
>via in pyrex wafer using Drie etch process and metalization of these
>ones.
>Thank you very much.
>
>*********************************************************
>Dr. Paolo Bondavalli
>R&D MEMS Engineer
>MICROTEC MEMS
>
>