Heiko,
There is really no problem with diluting SU-8 (of any grade) to create thinner
layers. The two biggest concerns will be consistency of dilution from one batch
to the next, and thoroughness of mixing. SU-8 readily dissolves in a variety of
solvents; it's just a matter of getting the right viscosity.
You could start with diluting the SU-8 25 1:1 with GBL, if you have it
available. This should get you to roughly the appropriate solids content to
achieve an ~1 um layer. If you don't have GBL available, you could use a variety
of other solvents (such as PGMEA, which is used for developing the resin). Just
bear in mind that different solvents will have differing effects on the film
viscosity.
Also, because GBL is a low vapor pressure solvent, it does not dry quickly. By
changing the spin time (i.e., increasing it), you can actually achieve an even
thinner layer.
Best Regards,
Chad Brubaker
EV Group invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com
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-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Heiko Pruessner
Sent: Wednesday, December 17, 2003 6:44 AM
To: General MEMS discussion
Subject: [mems-talk] Dilute SU-8
Hello everybody,
for a 3 wafer project I have to make an SU-8 layer of less than 1um. I have
Su-8-25 available with EPON/GBL 60%/40%. Spinning this 40sec at 6200rpm
(this is maximum) leads to a 10um layer after PEB. Does any one knows how to
thin and spin SU8-25 that a 1um layer can be done.
Regards,
Heiko
[email protected]
Micromotive GmbH
Carl-Zeiss-Str. 18-20
55129 Mainz
Tel.: 06131/62780-10
Fax.: 06131/62780-15
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