Dear Paolo

I wish this paper will help your research.

Dong-Weon Lee, Takahito Ono, Takashi Abe, and Masayoshi Esashi, "Microprobe
Array With Electrical Interconnection",
Journal of Microelectromechanical systems, vol.11, No.3, Jume 2002

S-H, Choe Esashi-Lab
Tohoku University
E-Mail: [email protected]

----- Original Message -----
From: "Paolo Bondavalli" 
To: 
Sent: Tuesday, December 16, 2003 2:03 AM
Subject: [mems-talk] via through pyrex


> Hi all!
> I'm looking for refrences, papers, articles related to realization of
> via in pyrex wafer using Drie etch process and metalization of these
> ones.
> Thank you very much.
>
> *********************************************************
> Dr. Paolo Bondavalli
> R&D MEMS Engineer
> MICROTEC MEMS
> THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
> Domaine de Corbeville,
> Route Departementale 128
> F91404 ORSAY
> (FRANCE)
> Tel : 01 69 33 08 63
> Fax : 01 69 33 08 62
> Email : [email protected]
> **********************************************************
> Disclaimer: Opinions expressed herein are my own and may
>   not represent those of my employer.
> **********************************************************
>
>
>
>
>