Hi!
We don't use gold, but if you do PECVD silicon oxide on top of aluminum
this one turns into aluminum oxide because of interaction with oxigen.
If you are doing some kind of electrical contacts, this layer is insulating.

Ing. Paolo Tassini
Centro Ricerche ENEA
Via Vecchio Macello, s.n.c.
80055    Portici    (NA)    Italy
tel. +39 081 7723289
fax +39 081 7723344




-----Messaggio Originale-----
Da: "Sjoerd Haasl" 
A: 
Data invio: mercoledì 17 dicembre 2003 12.30
Oggetto: [mems-talk] Adhesion layers for PECVD oxide


> Hello,
>
> To evaporate gold on oxide surface, usually one uses a layer of chromium
> or titanium as an adhesion layer.
>
> What now if I would want to deposit oxide (PECVD) on top of a gold
> surface. Should I put an adhesion layer on top of the gold? And if so,
> would it matter if I break vacuum while doing this? (i.e. I have to take
> the wafer from the evaporator to the PECVD, so the adhesion layer could
> oxidize a bit on the way.)
> The gold surfaces I am using are quite large (500microns x 5millimeters)
>
> Does anybody have any experience on this?
>
> Furthermore, should I expect problems when PEVCD oxide on aluminum?
> Again, I can imagine that the oxide layer on the aluminum could affect
> the adhesion.
>
> Thank you,
>
> Sjoerd Haasl
>
>
> Royal Institute of Technology
> Department of Signals, Sensors and Systems
> Microsystem Technology
> Stockholm, Sweden
>
>
>
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