Hi-

Is there a good way to clean small (<5mm square) silicon chips? Our chips have
lots of visiable residues after the dicing process, either from the dicing tapes
or wafer dusts. We have tried soaking in many different solvents but cannot seem
to get rid of them. These chips have fragile MEMS structures on them and will
break if we use ultrasonic agitation. Any suggestion would be greatly
appreciated. Thanks!


Jen


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