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MEMSnet Home: MEMS-Talk: Adhesion of Pt on Si, SiO2 and Si3N4
Adhesion of Pt on Si, SiO2 and Si3N4
2003-12-20
Raj Kumar
2003-12-23
Jason Viotty
Adhesion of Pt on Si, SiO2 and Si3N4
Raj Kumar
2003-12-20
Hello Memsnetigens

     Can anybody tell me adhesion behaviour of sputtered and e-beam
evaporated Platinum layer on Si, Si3N4 and SiO2.

 RAJKUMAR
 SCL,INDIA
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