Hi Jen,

  If your mems devices have "no free hanging structures" and are somewhat
physically resiliant, you can try the method described below.  However, for
this method to work you require a custom jig which allow liquid to flow
freely across your dice.

1.  Recirculating PR stripper solution (with filter if possible)
2.  Recirculating acetone
2.  Methanol dip
4.  Recirculating water soak with resistivity monitor
5. Spin cycle

Phil Tabada
UC Davis PhD Candidate

>From: Jen Robertson 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] cleaning small chips
>Date: Fri, 19 Dec 2003 17:04:59 -0800 (PST)
>
>Hi-
>
>Is there a good way to clean small (<5mm square) silicon chips? Our chips
>have lots of visiable residues after the dicing process, either from the
>dicing tapes or wafer dusts. We have tried soaking in many different
>solvents but cannot seem to get rid of them. These chips have fragile MEMS
>structures on them and will break if we use ultrasonic agitation. Any
>suggestion would be greatly appreciated. Thanks!
>
>
>Jen
>
>
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