Hi Jen,

   If you are dealing with small quantities of dice you can also try the
method below using petri dishes and teflon tweezers.

1. PR stripper soak
2. Acetone soak
3. Methanol soak (optional)
4. DI water soak
5. Diluted HF soak
6. Di water soak

For this to work, you have to watch out for cross contamination (use only a
specific petri dish for each soak and clean everytime before use)

Phil Tabada
UC Davis PhD Candidate


>From: Jen Robertson 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] cleaning small chips
>Date: Fri, 19 Dec 2003 17:04:59 -0800 (PST)
>
>Hi-
>
>Is there a good way to clean small (<5mm square) silicon chips? Our chips
>have lots of visiable residues after the dicing process, either from the
>dicing tapes or wafer dusts. We have tried soaking in many different
>solvents but cannot seem to get rid of them. These chips have fragile MEMS
>structures on them and will break if we use ultrasonic agitation. Any
>suggestion would be greatly appreciated. Thanks!
>
>
>Jen
>
>
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