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MEMSnet Home: MEMS-Talk: Silicon Nitride vs. Silicon dioxide
Silicon Nitride vs. Silicon dioxide
2003-12-21
Shengdong Li
Loss tangent of Si, SiO2, and Si3N4.
2003-12-22
Park, Daniel Sang-Won
Silicon Nitride vs. Silicon dioxide
Shengdong Li
2003-12-21
Hello, Everyone,

I am beginner working on micro/nano Fabrication. I am curious about two
dielectrics: Silicon Nitride and Silicon dioxide.
When it comes to gate insulator (gate insulating layer) in top-gated
transistors, which one is better? Is there any good research paper or review
paper about this issue.
Thank you very much.

Sheldon


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