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MEMSnet Home: MEMS-Talk: Loss tangent of Si, SiO2, and Si3N4.
Silicon Nitride vs. Silicon dioxide
2003-12-21
Shengdong Li
Loss tangent of Si, SiO2, and Si3N4.
2003-12-22
Park, Daniel Sang-Won
Loss tangent of Si, SiO2, and Si3N4.
Park, Daniel Sang-Won
2003-12-22
Hi, all.
I'm trying to get data for the loss tangent of Si, SiO2, and Si3N4.
I'd really appreciate if anyone provides me with such information or source.

Best regards.

Daniel Sang-Won Park
Graduate Research Assistant
UTD MiNDS (http://www.utdallas.edu/~jblee/research/index.html) Lab
[Cell] 214-952-8649, [Fax] 972-883-6839
[E-mail] [email protected]
[Web] http://www.utdallas.edu/~spark



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