Hi all,
       I would like to sputter Cu (thickness of about 2 microns) . However i
understand that i need to modify my sputtering parameters to do this.

Currently my parameters are :-

Pr(base)= 5 * 10 ^(-5) torr

Pr (chamber)= 30 m torr

Power = 300 W



Does anybody have any experience in sputtering thick Copper.Pls let me know.

Thanks in advance,
             Dipankar Ghosh





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