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MEMSnet Home: MEMS-Talk: PMMA as sacrificial layer
PMMA as sacrificial layer
1997-12-18
Ramadas, Padmaja
PMMA as sacrificial layer
Ramadas, Padmaja
1997-12-18
Dear MEMS members,
I am new to this field and would like to know if someone has used PMMA as a
sacrificial
layer.  I would appreciate I could have some references.
I also wanted to know if someone has used this resist to spin into cavities of
60um deep.

Thank you,
Padmaja


reply
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