Hi Duhyun
According to the "Edwards" catalogue carbon crucibles are recommended
for Ti.
greetings
Stefan

-----Original Message-----
From: [email protected]
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Behalf Of "Lee, Duhyun"
Sent: Dienstag, 23. Dezember 2003 06:25
To: [email protected]
Subject: [mems-talk] crucible for Ti




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What kind of crucible can I use for e-beam evaporation of Ti? As far as
I know, TiC is recommended, but I don't have it.

I have Al2O3, Mo, W, and graphite crucibles.

please advice me...


Lee, Duhyun

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Technology Innovation Center(TIC)
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Sungkyunkwan University, KOREA
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