Jen,
    One of our customers asked for a special plasma cleaner to handle chips in a
waffle pack to help with this problem.  Contact me directly and I will go into
greater detail.  Bill Moffat

-----Original Message-----
From: Jen Robertson [mailto:[email protected]]
Sent: Friday, December 19, 2003 5:05 PM
To: [email protected]
Subject: [mems-talk] cleaning small chips


Hi-

Is there a good way to clean small (<5mm square) silicon chips? Our chips have
lots of visiable residues after the dicing process, either from the dicing tapes
or wafer dusts. We have tried soaking in many different solvents but cannot seem
to get rid of them. These chips have fragile MEMS structures on them and will
break if we use ultrasonic agitation. Any suggestion would be greatly
appreciated. Thanks!


Jen


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