Dear All,
I read several posts regarding to adding photo initiator(DMAP)to PDMS so that
PDMS can become UV sensitive. I failed to repeat it. Highly appreciated if
anyone can share the recipes in detail. Such as, are Pre-bake, or post-bake
reqired? what is the temprature for baking? how long the exposure time? Can
the mixture be use instantly after mixing? What color the mixture should be?
I tried Dow Corning (Sylgard 184) and (Gelest RMS-033). After mixing DMAP,
Tulene, and PDMS, I degased the mixture and span coat the mixture to pre-RCA
cleaned Si wafer. The UV wavelength is 405nm. I exposed up to 1 hour with
contact printing!!! I develped it in Xylene and IPA dry. Not work!
Merry X'mas and Happy New Year!
Lydia
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