Jen - I work for a company that uses vacuum to remove all air from a process
chamber (eliminating the air to surface barrier) to achieve significantly
better than typical cleaning. We also have a new patented technology that
targets contaminates on surfaces for removal without using ultrasonic energy
(long story short, we grow a bubble on the contaminate and then cause the
bubble to implode releasing its energy to remove the contaminate. If you are
interested please feel free to drop me a note at [email protected].

Thanks.

Jack

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Jen Robertson
Sent: Friday, December 19, 2003 6:05 PM
To: [email protected]
Subject: [mems-talk] cleaning small chips

Hi-

Is there a good way to clean small (<5mm square) silicon chips? Our chips
have lots of visiable residues after the dicing process, either from the
dicing tapes or wafer dusts. We have tried soaking in many different
solvents but cannot seem to get rid of them. These chips have fragile MEMS
structures on them and will break if we use ultrasonic agitation. Any
suggestion would be greatly appreciated. Thanks!


Jen


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