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MEMSnet Home: MEMS-Talk: Low curing temperature Spin ON Glass (SOG)
Low curing temperature Spin ON Glass (SOG)
2003-12-30
[email protected]
Low curing temperature Spin ON Glass (SOG)
[email protected]
2003-12-30
Hi Ismail,

I saw you posted the below message in the internet. Did anyone reply to you?
Have you found a suitable material that you need. I'm looking for similar kind
of material and I would very much appreciate if you could share your experience
with me. I'm Margaret, a R&D engineer working on material development for the
opto division of Agilent Technologies. I really hope you can help. Thanks!

Dear All,
We are looking a product for planarization process i.e a spin on glass (SOG)
material which can direct sustitute for LTO, TEOS or CVD oxide, non-etch back
application (permanent dielectric layer), low curing temperature (<400 deg
celcius), has a good adhesion to pyrex, Si, SiO2 or metal (gold, Pt etc.). We
also would like to know the method/material/etchant for patterning this type of
SOG. If anybody know which company sell/supply this type of SOG, please send the
contact details to us. Thank you in advance.
Kind regards, A.K.Ismail


Regards,
Margaret Tan Kheng Leng
Optoelectronics Products Division (OPD)
Agilent Technologies Malaysia
Direct Line : (604) 680-8901
Fax : (604) 644-9533







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