Nadav -

Have you tried NMP or Methylene Chloride? Methylene Chloride could react
with the Al depending on what state the AL is in so be careful of that. We
manufacture surface treatment equipment and do quite a bit of testing in our
lab and have had good success with these chemistries for removing coatings.
You may also want to see what kind of chemistries Ashland has to offer. I
hear they make good coating removal chemistries.

Good luck!

Best regards,

Jack Mulligan
www.HyperFlo.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Nadav Agian
Sent: Tuesday, December 30, 2003 4:38 AM
To: [email protected]
Subject: [mems-talk] AZ5214 remover

I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav
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