Hi,

 I used ANSYS to do both strucutral and electrostatic simulation  to design
a tilt mirror, which has been summaried in a paper , titled " A Design
Methodology for a Bulk-micromachined Two-Dimensional Electrostatic Torsion
Micromirror", Vol. 12, No. 5, October 2003, pp. 692-701.

It may be of some help to your work.

Julie



----- Original Message -----
From: "Santanu Chandra" 
To: 
Sent: Friday, January 02, 2004 3:51 PM
Subject: [mems-talk] Need Advice on Mems Electrostatic Simulation in
Ansys7.0


> Hi all,
> I am having difficulty in simulating a capacitive sensor modelled in Ansys
7.0. My main concern is measuring the capacitance change for a change in
deflection of two plates.
> Can anyone help me understand the process that should be followed to
extract the capacitance after the deformation has occured due to some
structural force acting on one plate.
> I can calculate the capacitance using the CMATRIX macro for a static model
but I need suggestion for the coupled analysis of the model. first
structural and thene electrostatic.
> I would appreciate if anyone can help me out.
> Thanking you
>
>
>
>
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