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MEMSnet Home: MEMS-Talk: AZ5214 remover
AZ5214 remover
2003-12-30
Nadav Agian
2003-12-30
Jack Mulligan
2003-12-30
David Schreiber
2003-12-30
[email protected]
2004-01-05
Jason Viotty
help
2004-01-05
[email protected]
2004-01-05
T. Hamano
AZ5214 remover
Jason Viotty
2004-01-05
If your devices are not fragile, you could try doing an ultrasonic cleaning
in Acetone. We often use this method to remove toughened resist.

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________


-----Original Message-----
From: Nadav Agian [mailto:[email protected]]
Sent: dinsdag 30 december 2003 12:38
To: [email protected]
Subject: [mems-talk] AZ5214 remover


I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav
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