If your devices are not fragile, you could try doing an ultrasonic cleaning
in Acetone. We often use this method to remove toughened resist.

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________


-----Original Message-----
From: Nadav Agian [mailto:[email protected]]
Sent: dinsdag 30 december 2003 12:38
To: [email protected]
Subject: [mems-talk] AZ5214 remover


I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/